pmma resist datasheet
The PLEXIGLAS Resist family provides a wide range of impact PMMA grades. Put the PMMA bottle back into the fridge. %PDF-1.5 PMMA Datasheet Extruded Polymethyl-Methacrylate General properties Excellent transparency with a light transmission of 92%. Exhibits high UV light resistance, durability, weathering, excellent transmission, clarity, brilliant appearance, increased heat deflection temperature under load and excellent optical properties. It is time for a new era in mobility. 2 0 obj This is because so many factors can affect a materials chemical resistance. PMMA resists are simply PMMA polymer dissolved in a solvent like anisole (safe solvent). PMMA is spun onto the substrate and baked. PLEXIGLAS Resist zk5BR | PMMA-I | Rhm GmbH Product Texts Productprofil: PLEXIGLAS Resist zk5BR is an amorphous, impact-modified thermoplastic molding compound (PMMA-I). Develop in MIBK:IPA 1:3 or IPA:H2O 9:1. PMMA is most commonly used as a high resolution positive resist for direct write e-beam as well as x-ray and deep UV microlithographic processes. endobj PMMA Positive Resists PMMA (polymethyl methacrylate) is a versatile polymeric material that is well-suited for many imaging and non-imaging microelectronic applications. 0000001487 00000 n Performance cookies are used to understand and analyze the key performance indexes of the website which helps in delivering a better user experience for the visitors. 3 0 obj stream Chemical Solutions for MEMS and Microelectronics, and Functional Electronic Inks. Make sure your components are operational before they enter the field. Data [Expressions for n] [CSV - comma separated] [TXT - tab separated] [Full database record] . Thank you. 0000006378 00000 n trailer Clean your sample using solvent or acid clean procedures, Dehydrate the sample on hotplate for 5 min. It can be colored, molded, cut, drilled, and formed. PLEXIGLAS Resist AG 100 is an amorphous thermoplastic molding compound, based on impact-modified polymethyl methacrylate (PMMA). A mixture of IPA:H2O (9:1) can also be used to develop PMMA, espacially for narrow patterns. PMMA - Datasheet www.emresist.com Page 1 of 5 Media House Adlington SK10 4NL United Kingdom +44 (0) 1625 813723 info@emresist.com PMMA Resist - Datasheet Features Introduction Film Thickness: 0.5 - 5 m Industry Standard High Resolution Versatile PMMA (polymethyl methacrylate is a widely used, versatile, positive tone endobj % COB4*SvB6H${#rh:j}6 %PDF-1.7 stream x]r8;UMH4CPzc(eIjF*=o5-2AHZGX*eg?777j{sxeOEU4gnyO 0000036144 00000 n Poly(methyl methacrylate) (PMMA) is the synthetic polymer derived from methyl methacrylate.Being an engineering plastic, it is a transparent thermoplastic.PMMA is also known as acrylic, acrylic glass, as well as by the trade names and brands Crylux, Plexiglas, Acrylite, Astariglas, Lucite, Perclax, and Perspex, among several others ().This plastic is often used in sheet form as a lightweight . 0000007191 00000 n 0000004116 00000 n Product information. 5?VyQ[fq5ZoZGG3F s88cYw,z!=I#9JR M.,pNxG4`=h7e3/v [ y3C3FHf2 Od{-}2jPHpIu; 87mp4j%$e+}xr8)u%/_njaUKJ]&5ywb>N(EUJpPIVMAo.WPL NR!bN"xNJ1&,oSx3u1`V?k+fAJ|wk"k# Cold PMMA (or any other resist) bottle MUST NOT be opened when there are still sold as water will condensate in the bottle and deteriorate the resist quality and thus your process. Passed all tests in line with ECE R43 and listed under AMECA and CAMPUS. Properties PLEXIGLAS molding compounds have the following typical properties: high weather resistance pellets of uniform size in 25kg polyethylene bags or 500kg excellent transmission and clarity One of PMMA's primary attributes is its simplicity: PMMA polymer dissolved in a solvent (Anisole safe solvent). In the bilayer PMMA process, a layer of PMMA 495K is spun on the HlTAn1+*D9E{n{0@ N` ]M h8BjY KKrGI/>?.OvHn[>Mrrwxx>^C: y2WIEPv|bAs. PMMA Data Sheet of 8 PMMA (polymethyl methacrylate) is a versatile polymeric material that is well suited for many imaging and non-imaging microelectronic applications. It does not yellow over time. <> Descum Light! product exposure resolution applications developer thinner stripper datasheet; LOR & PMGI. <>/ExtGState<>/ProcSet[/PDF/Text/ImageB/ImageC/ImageI] >>/Annots[ 14 0 R] /MediaBox[ 0 0 612 792] /Contents 4 0 R/Group<>/Tabs/S/StructParents 0>> mE>q~F f=@xvGrro]A6n!*,DYoWBa2~1$LBXY=pjer9*t6Xnw_ _1YV1`J?C)JC/-LC}rZO6n^Y5'duzq{w'mApUl /XP7;a( (Z>,D] d+Yz?hmf~]%JWPwLevDGJU ~8>wkaxY In this case the higher sensitivity of the Copolymer is traded for the higher resolution of PMMA. This cookie is set by GDPR Cookie Consent plugin. High gloss and colorless. a resist is a thin layer used to transfer a circuit pattern to the semiconductor substrate which it is deposited upon. This chart is a guide to PMMA compatibility with a wide range of chemicals found in industrial, commercial and laboratory applications. Although PMMA may be used in a single layer resist process, it is most commonly used in Copolymer resists are based on a mixture of PMMA and ~8.5% methacrylic acid. A mixture of 1 part MIBK to 3 parts IPA produces very high contrast but low sensitivity. Because it is BPA free, it is also a useful BPA-free alternative to polycarbonate frequently used for making component parts for medical, biological and biopharmaceutical applications. Parylene Conformal Coating Services and Equipment. Advertisement cookies are used to provide visitors with relevant ads and marketing campaigns. Acrylic (PMMA) plastic and these chemical compatibility guidelines. IT0\UW>G}9NM(|&(! Shows clear reduction of reversible haze at very high and low temperatures. 2 0 obj 4 0 obj This cookie is set by GDPR Cookie Consent plugin. Then pour some of the resist into one of the amber container. * [GNOH.+,HLV,bF@a 6r*$.67#l[sfEhN5UJW(,nE5nx 9jN9HM O)9?1bytS5ps*;4CT& R|wWCg>)k^NwY,OQn_M"Y3JAE~Fb'LmeOz2;AFH? It is the standard positive e-beam resist and remains one of the highest resolution resists available. PMMA is also used as a protective coating for wafer thinning, as a bonding adhesive and as a sacricial layer. The best way to evaluate and fully test the suitability of a part is to get a sample and test it out in the specific service conditions. Therefore, the developer is usually diluted by mixing in a weaker developer such as IPA. endobj <>>> <>>> endobj LUlh?x\*V;4`AEllZ&j.=so%UFk`'Lh'8 @ H^c=`hcMa}B9Gr$Gkn 5E6bU*'FmREE'HA3PyWnj#>] OhCB)|f endobj But opting out of some of these cookies may affect your browsing experience. This cookie is set by GDPR Cookie Consent plugin. PMMA (polymethyl methacrylate) is a versatile polymeric material commonly used as a high-resolution positive resist for direct write e-beam applications. PMMA (poly methyl methacrylate) and MMA (8.5) (methyl methacrylate) are positive ebeam resists consisting of long polymer chain of carbon atoms which comes in various molecular weights. Download Product Datasheets Safety Data Sheets SML Safety Datasheet PMMA Safety Datasheet GM Series Resist Safety Datasheet HSQ Resist (Powder only) Safety Datasheet HSQ Resist (solution) Safety Datasheet a}~ ,L7tu These cookies track visitors across websites and collect information to provide customized ads. Spin coat PMMA with one of the Laurell programs between E and H, according to the table at the end of the page. Strip resist stack GaAs Tri-Layer Process PMMA resists for T-gate and other imaging processes PMMA is a high resolution positive tone resist for e-beam, deep UV (200-250nm) and X-ray lithographic processes. Characteristics: Positive tone Very high resolution Limitation: Due to the undercut, line separation must be more than 500 nm Poor dry etch resistance No shelf life or . O)aC]ZZW(m yky| VZ} }?3:ji):{^P.Eu8Uk]vn`9o')6R5.k_'R7z`V)TVaUi58idiU{s(uM;\Dn"53e[kRSc*]OEcWaVVqh*j\k;mDuvB>Ww}=C"f.fjEo5`qe{(e8}He[p[0x 3lC.\IY6B~PBQ hZV?rE]Y}'|F=E~[rws7Z8q3KG3K7%gdcYm`C(h@q^|k7tp@U0Ol6(YsNn@>]'n> ]^~{aw;>[Jk@VjQysl}#\w'EtX~mnqL&phPnD^$pec W-9Y2WZ"H%lY%T {mT:h;PhG+s1dFjf*N`I B-gy&P3%{), 4{c*`WUk8!B8^G1XM@PGb7]jKvyd3T-dyD b pF^Xw(1-JY2u$R. 40 0 obj<>stream Acrylic plastic also has excellent resistance to ultraviolet (UV) light and weathering. Resistant to weathering conditions. Brilliant optical characteristics and balanced property spectrum. PMMA (polymethyl methacrylate) is a versatile polymeric material that is well suited for many imaging and non-imaging microelectronic applications. Downloads | EM Resist Ltd Downloads Here you can find a list of product documents and datasheets as well as links to a selection of papers. (Polymethyl methacrylate) Acrylic PMMA is a tough, highly transparent material with excellent resistance to ultraviolet radiation and weathering. Download the complete Acrylic Chemical Compatibility Chart PDF >>. O_/o?b"^UU{)kNSQx:6-,Kj;&0L4!.5G^q]#dG=NzzIJ,@HX/~OE; z>pw X])0K1GQ\/_6-(-(]u\JSw8-'9_NuG h=B|!5#fYLM\>@c.nBZ VBQVm-dUh+knNR1(a3*#rpdqg.'(|}r_-:;9gg&MFXH. sub 0.25 m . Unless Kayaku Advanced Materials specifically and expressly contracts in writing with the customer for a particular intended use of our product, the choice of our product for any particular intended use is the sole and exclusive responsibility of the customer; and Kayaku Advanced Materials shall in no event ever have any responsibility for, nor incur any liability for any particular use or application of its product by the customer absent such a specific and express written contractual agreement otherwise. Standard PMMA products cover a wide range of lm thicknesses and are formulated Facilitates to manufacture parts and surfaces where a combination of impact strength, perfect optics and high resistance to environmental stress cracking is required. Expose. Out of these, the cookies that are categorized as necessary are stored on your browser as they are essential for the working of basic functionalities of the website. % 0000009597 00000 n 0000044323 00000 n Do not preheat the PMMA. Used in injection molding and extrusion processing. It can be processed using injection compression molding and extrusion (sheet, thermoforming & co-extrusion). Acrylics are generally not recommended for use with. Please contact me. M^_dh%d@c)afE]{7;0b8mvmGeL47W#e2$|c9A-T-("MaUhj9AQg7K1Vj#P\~Vw.fu3H8jt=^{)? Electron beam exposure breaks the polymer into fragments that are dissolved preferentially by a developer such as MIBK. Standard copolymer resists are formulated in ethyl lactate and are available in a wide range of film thicknesses. By making the developer stronger, say, 1:1 MIBK:IPA, the sensitivity is improved significantly with only a small loss of contrast. Look-up the PMMA datasheet for more detailed information: PMMA datasheet; Bake sample on hotplate at 180C for 90 s; Exposition dosage needs to be tuned according to your patterns and the resist thickness. Suitable for vehicle applications including automotive glazing, durable taillight covers, non-transparent add-on body parts, vehicle interiors (decorative trim, ambient lighting & door entry strips), rear side windows, roof and rear windows. uvU7Sl=;2 N[L`\#!Eh4r{e e-beam, deep UV (248 nm) very good adhesion to glass, silicon and metals; for planarization and multi-layer processes; Good electrical insulation from high electrostatic charges. Exposure causes scission of the polymer chains. 1 0 obj Bake resist, hotplate, 180 C, 60-180 seconds. These cookies help provide information on metrics the number of visitors, bounce rate, traffic source, etc. Combines light diffusing properties with impact resistance, Rhm GmbHDeutsche-Telekom-Allee 964295 DarmstadtGermanyPhone +49 6151 863-7000, 7F, Westlink Tower A, 2337 Gudai Road,Minhang District201100 Shanghai, P. R. ChinaPhone: +86 21 6759 1000, Roehm America LLC8 Campus DriveSuite 450Parsippany, NJ 07054USAPhone: +1 800 225-0172, An Inspirational Brand for more than 85 Years, the pleasant feel and sound of the moldings, During mechanical impact the rubber domains absorb energy, Stop of crack propagation as micro-cracks are stopped when they reach a rubber domain, Screw feeding performance becomes more homogenous, Good demolding properties during injection molding, During extrusion and post treatment: Smooth cutting of edges and no chipping during drilling, Luminaire with IP66 safety class meets highest requirements for industrial lighting, Housing and diffuser made from impact-resistant PLEXIGLAS Resist zk5BR special molding compound, Brand PMMA from Rhm impresses with impact resistance, high transparency and good chemical resistance, High-gloss emblems are a current trend in the automotive industry, VW is relying on PLEXIGLAS molding compounds for its new black and white emblems, PLEXIGLAS Hi-Gloss is a high-gloss molding compound available in jet black and in a brand new white coloring, Innovative front light design for one of the worlds bestselling cars, Interplay between two highly specialized PLEXIGLAS molding compounds, PLEXIGLAS meets the highest visual and functional demands for the front of a vehicle, The long-established company has been using PLEXIGLAS molding compounds as a proven material for its high-quality plastic vials for more than 60 years, Excellent transparency, UV resistance, durability and good flow properties when used in injection molding processes, Walter Burgermeister GmbH uses the recyclability of Rhms brand PMMA to create a sustainable production process. These cookies will be stored in your browser only with your consent. High resistance to UV light and weathering, Limited chemical resistance, prone to attack by organic solvents, High injection pressures are needed because of poor flow properties and it may be necessary to inject slowly to get the correct flow, Internal stresses can be eliminated by heating at 80C, A degassing screw with an L/D ratio of 20-30 is recommended. BTJ6@>NYE@`_P@ PMMA etches very fast in oxygen. 0000009821 00000 n 3 0 obj Hot plate bake at 180 C for 2 minutes. Functional Chemicals, Pharmaceuticals, Safety Systems and Agrochemicals. PMMA 950K Typical Process Parameters 1. 50? z&9fvT0.#`>;X0_x\R~=qi:8&yxBB$q 2#84Hc9@ 8:D+I:KpSE#||i`N/{ Mq$+&I9rq{{{KRFfoy*"=XEXFA%Ej)d.l[Cfg*f!O. |fwh++=9|2o_t\C_G The microfab stocks only PMMA 950K A2 and A4. Things to keep in mind when referring to this chemical compatibility guideChemical resistance information is based on data provided by testing done under laboratory conditions. Suitable for decorating. Analytical cookies are used to understand how visitors interact with the website. deposited materials. stream In the single layer PMMA process, typically a single layer of PMMA 950K is spun onto the substrate and exposed, as shown in Fig 1a). Acrylic (PMMA) chemical resistance In general, acrylics are unaffected by . %PDF-1.5 XDEz>`oCcpNDprG Get in touch . It is especially attractive for its high, optical quality transparency and useful mechanical properties. <>/Metadata 541 0 R/ViewerPreferences 542 0 R>> It does not store any personal data. Acrylic (PMMA) biocompatibilityPMMA is very biocompatible with human tissue. Products of the PLEXIGLAS Resist family are amorphous, impact-modified thermoplastic molding compounds. Electric drives and autonomous driving are fundamentally changing the design of the cars of the future, and the same applies for lighting. These cookies ensure basic functionalities and security features of the website, anonymously. etch resistance. It is best known by its trade names Lucite and Plexiglas. 0 PMMA or acrylic is a widely used transparent plastic material known for its applications in various markets from car windows, smartphone screens to aquariums. PMMA is most commonly used as a high resolution positive resist for direct write e-beam as well as E-beam, X-ray & deep UV imaging x-ray and deep UV microlithographic processes. High rigidity. Because it is BPA free, it is also a useful BPA-free alternative to polycarbonate frequently used for making component parts for medical, biological and biopharmaceutical applications. 0000001224 00000 n 0000036102 00000 n Environmental stress cracking is not purely a result of chemical attack. Get some added insight into chemical compatibility at the ISM chemical compatibility chart page. top-imaging resist: g-, i-line, DUV, 193nm & e-beam. Acrylic is tough, durable, easy to shape and relatively inexpensive. Enables the manufacturing of fine-layered and thin wall structures during injection molding. ACRYLITE Resist AG 100 is easy-to-apply by one-step scratch-resistant coating system, either by a hard surface coating or screen printing. <>>> The cookie is used to store the user consent for the cookies in the category "Analytics". PMMA shows high resistance to UV light and weathering. PMMA is most commonly used as a high resolution positive resist for direct write e-beam as well as x-ray and deep UV microlithographic processes. They are suitable for extruding and coextruding profiles and sheets as well as for injection molded formed parts. Possesses low weight and up to 30 times breaking strength of mineral glass. The time depends on the resist thickness and the size of the patterns. Download the complete Acrylic Chemical Compatibility Chart>>. PMMA resists are simply PMMA polymer dissolved in a solvent like anisole (safe solvent). To use PMMA, grap the bottle in the fridge and allow it to reach room temperature: about 1 hour. %PDF-1.6 % What is acrylic plastic?Acrylic (PMMA, polymethyl methacrylate) is a widely used amorphous thermoplastic polymer. PMMA Resist Process (950A2 or 950A4) (Typically Used For Metal Liftoff Processes) Spin Coating and Baking PMMA 950A2 or 950A4 Typical process: 1. 0000008820 00000 n 0000003847 00000 n <> 1 0 obj mBjR*R1J5s?+/kR_YU\Wi^k Q_?_2]_g}Ej^.i+m[W'Wn7{mtTRD~JoFgc 2'6ifm~f[.hJ70tGhoV?r818/ +kFQ^G%ljr-WwkEG 0000038977 00000 n The cookie is set by GDPR cookie consent to record the user consent for the cookies in the category "Functional". Although PMMA may be used in a single layer resist process, it is most commonly used in It is produced from monomer methyl methacrylate. Microchem PMMA Datasheet, 2001. x]o77/HE^CQI4.@Y^9^M +2Ewwo>HuzXoN~|^_N/7N/?n~7W=vqv~}}8>k(AM3FP+t|{\+sQYeUJ=wpB/0`y!F!rBADusKgW`w-rxO7gUFJxuUee|^-nZSP4Pl04iWYj2>!D E#z*)qy9 Et6AqYi;)gW?1F'\+V/& 0000006648 00000 n - spread at 500 rpm for 5 s with acceleration of 1305 rpm/s, - spin between 3000 and 5000 rpm for 45 s with acceleration of 1305 rpm/s. 0000005856 00000 n It is resistant to most detergents, inorganic chemicals, aliphatic hydrocarbons, fats and oils, diluted acids and concentrated alkalis at room temperature. The cookie is set by the GDPR Cookie Consent plugin and is used to store whether or not user has consented to the use of cookies. PLEXIGLAS lends the surface of the housing an elegance that endures. Learn more details about the properties of acrylic (PMMA) plastic at Polymethyl methacrylate Properties and Their Values by SpecialChem. Have a question? nf). 3. %%EOF Acrylic (PMMA) chemical resistanceIn general, acrylics are unaffected by laboratory chemical solutions where water is the solvent. This datasheet of PLEXIGLAS Resist zk5BR from Rhm GmbH is provided by the international plastics database CAMPUS . The following table gives thicknesses vs. speed measured at the center of silicon samples of 1x1 cm. Develop in MIBK:IPA 1:3 or IPA:H2O 9:1. PMMA (polymethyl methacrylate) is a versatile polymeric material that is well-suited for many imaging and non-imaging microelectronic applications. References. Spin at 500 rpm for 5 seconds, followed by 3000 rpm for 40 seconds. :-QHf+/ pR+L}Ei_S,9Z2J}Z.*']W{sS p y!_adKmDGtJn XTJ3,OYF*oJKD71Y\ODE)1t8w:v\c+8C> ; c n)rkQB$9oh_ 9p:35JH[aFT}^rtMI0?%N7b/i3H1#Xm*v5]m|d_{noix` g,FMIM*qC3CY#.dN&d9Hn^Rmo'[=Tb=;"lc6z3 T} \u{T]7nkOGrNdDHr9e1wX,A4e |'tpNDWqI'&n3v]LynU @>aw|sz[w .esnk>uRBg6CSAQ2'(rdP4)QUAQ62+iLy2"1YW>zqeG ['0yZ$ rQhe(!# >+2(Juah_'N|M?$QV\If4 lS!Yoldr dlTw5@Ttta;Q|12j PMMA resist series 50K - 950K for the production of integrated circuits and masks. <>/ExtGState<>/XObject<>/ProcSet[/PDF/Text/ImageB/ImageC/ImageI] >>/MediaBox[ 0 0 595.32 841.92] /Contents 4 0 R/Group<>/Tabs/S/StructParents 0>> Check out grades with good chemical resistance , establish a successful plastics recycling system. Vorwerk describes its Thermomix as the unique kitchen appliance, for which the manufacturer relies on sophisticated technology and first-class materials. }"\Ue%u!ZSoVVY\_O*UO^ The Copolymer is used as a bottom layer with PMMA on top. <> Rinse and Dry An IPA (isopropyl alcohol) rinse may be necessary 0000009710 00000 n Apart from reducing vehicle weight, injection molded glazing offers maximum freedom of design and functional integration, such as the integration of lighting or panel trim. 4 0 obj 1 0 obj Good mechanical . Remover PG Technical Data Sheet, November 2020, Page 2/2 Agitation Mechanical or ultrasonic agitation will enhance physical transport of swollen/dissolved resist away from the substrate. !J?? It is 0000007301 00000 n 0000004801 00000 n 0000002310 00000 n Also, learn about conditions to process this polymer material and how to recycle it. 0000036197 00000 n 0000035723 00000 n Removal rates increase dramatically with temperature. XYC^2&|2Apf{}HCq? U`#S sN{ endobj A combination of three factors cause stress cracking: tensile stress, a stress cracking chemical and the inherent susceptibility of a thermoplastic to stress cracking. endstream endobj 9 0 obj<><><>]>>/OCGs[10 0 R]>>/Type/Catalog>> endobj 10 0 obj<>/PageElement<>/View<>/Print<>>>/Name(Background)/Type/OCG>> endobj 11 0 obj<>/ColorSpace<>/Font<>/ProcSet[/PDF/Text]/ExtGState<>>>/Type/Page>> endobj 12 0 obj[/ICCBased 37 0 R] endobj 13 0 obj<> endobj 14 0 obj<> endobj 15 0 obj<>stream Technical Datasheet | Supplied by Roehm PLEXIGLAS Resist AG 100 (Available as ACRYLITE Resist AG 100 in Americas) is an impact-modified, completely recyclable PMMA (polymethyl methacrylate) grade. 8 0 obj <> endobj Other uncategorized cookies are those that are being analyzed and have not been classified into a category as yet. They are kept in the fridge. This is usually done using immersion testing on unstressed material samples. *tNXz=F.OL:L+npB!4^&v>o@MtHL7o-7E"Xk s1/Hu[,;\h$hDoWy-Jhym:..RtOAoz c7 `4WiC68[i5mPpTf;2R V +6eYj$k9Xe#,;YM\O 0^ Dr!68 f5kV"cY4\.NkpslU.PH[0m[!3g{aq(M=bY\?8sQj.]jJeSJ7fVZ}J-N0? 0000001642 00000 n 2. Explore polymethyl methacrylate (PMMA) in detail along with its key properties and understand what makes it an ideal choice in so many applications. Time Removal time will naturally depend on the environ-ment the resist has seen previously. PMMA Processing PMMA is positive resist, therefore the resist that is exposed by the electron beam is removed after developing. Depending on the basic molding compound, the impact-modified grades differ in their key properties, such as optimized flow or stress crack resistance. "P>oD79DB"7D 1x/Ie7!HfMe8ef [*1g[hhZZOg?_7kQ m~}o}yr[O/uml5GSE\7wzL,]G`9O { A - B - C - D - E & F - G & H - I, J, K, & L - M & N - O & P - R & S - T & U - V, W, Y, & Z, ISO 9001:2015 Certified Companies 0000000956 00000 n The smaller the distance between ingredients, the more compatible they are predicted to be. x]6}WV5!QCZ}6&J^zee_ Q$qI4pW dH/~(7-mWj7?> 3 0 obj Technical Datasheet | Supplied by Roehm ACRYLITE Resist AG 100 is an impact-modified, completely recyclable polymethyl methacrylate (PMMA) grade by Roehm. It has excellent scratch resistance when compared to other transparent polymers like Polycarbonate, however less than glass. PVDF resin formulations differDifferences in PVDF resins and components made from them can vary because of variations in processing method, compounding, component dimensions and shapes and other variables. <> Your request for this product. 4 0 obj Polymethyl methacrylate (PMMA) was one of the first materials developed for e-beam lithography. 0000000016 00000 n endobj If not click the link. Real mould ability. 0000003185 00000 n Redirecting. A little about acrylic (PMMA) thermoplastic and its chemical resistanceAcrylic (PMMA) thermoplastic is notable for its clarity, long service life and UV resistance. Depending on the basic molding compound, the impact-modified grades differ in their key properties, such as optimized flow or stress crack resistance. <> ~gK_+5vVKJR1}S_H5G_UCh[f\ 2023 Kayaku Advanced Materials, Inc. - All Rights Reserved. The time depends on the resist thickness and the size of the patterns. Very high impact strength combined with brilliant optics, high heat deflection temperature and mechanical strength. Cette page a bien t ajoute vos favoris. PMMA Resist Poly(methyl methacrylate) (PMMA) is far and away the most popular e-beam resist, offering extremely high-resolution, ease of handling, excellent film characteristics, and wide process latitude. <<662BDD479C2A844B807A8E05E39752F7>]>> PMMA is most commonly used as a high resolution positive resist for direct write e-beam offering extremely high-resolution, ease of handling and excellent film characteristics. Spin resist, 60 seconds (longer, 90 or 120 seconds for very thick coatings) 3. Stress CrackingCertain combinations of chemical exposure and mechanical stress can also cause environmental stress cracking. 0000002105 00000 n PMMA is also used as a protective coating for wafer thinning, as a bonding adhesive and as a sacrificial layer. %PDF-1.5 Rinse in IPA after MIBK:IPA or in water after IPA:H2O for 20 s. The cookies is used to store the user consent for the cookies in the category "Necessary". Possesses low weight and up to 30 times breaking strength of mineral glass. These impact-modified PMMA grades are used when applications require the benefits of PMMA in combination with improved crack resistance. Browse the Acrylic Chemical Compatibility Chart Below >> It is a cost-effective alternate to polycarbonate when desired properties are tensile strength, flexural strength, transparency. <>/XObject<>/ProcSet[/PDF/Text/ImageB/ImageC/ImageI] >>/Annots[ 16 0 R] /MediaBox[ 0 0 612 792] /Contents 4 0 R/Group<>/Tabs/S/StructParents 0>> Up to 30 times breaking strength of mineral glass EOF acrylic ( )... Is set by GDPR cookie Consent plugin, as a sacrificial layer the cookie set! Pour some of the page A2 and pmma resist datasheet, Inc. - all Rights Reserved and Functional Electronic.... Depends on the resist thickness and the size of the patterns can processed. The website, anonymously, i-line, DUV, 193nm & amp PMGI. 9:1 ) can also cause Environmental stress cracking or screen printing are in... A light transmission of 92 % & amp ; PMGI resistance in general, acrylics are unaffected by laboratory Solutions. ) chemical resistance in general, acrylics are unaffected by reversible haze at very high low! To understand how visitors interact with the website well as x-ray and deep UV microlithographic.! Polymer into fragments that are dissolved preferentially by a hard surface coating or screen printing, bounce,... 30 times breaking strength of mineral glass extrusion ( sheet, thermoforming & co-extrusion ) n trailer your. And allow it to reach room temperature: about 1 hour of chemicals found in industrial, commercial laboratory... For e-beam lithography grap the bottle in the category `` Analytics '', for which the manufacturer relies on technology! This datasheet of PLEXIGLAS resist family are amorphous, impact-modified thermoplastic molding compounds very impact. These chemical compatibility chart page thick coatings ) 3 2 minutes to develop PMMA, grap bottle..., i-line, DUV, 193nm & amp ; PMGI etches very fast in oxygen resistance... I-Line, DUV, 193nm & amp ; PMGI manufacturer relies on sophisticated technology and first-class materials &! Following table gives thicknesses vs. speed measured at the center of silicon samples of 1x1 cm in! The PMMA and CAMPUS ISM chemical compatibility at the end of the,... The table at the center of silicon samples of 1x1 cm applications developer thinner stripper datasheet ; LOR & ;. Very high contrast but low sensitivity 9:1 ) can also cause Environmental stress is... Hotplate, 180 C for 2 minutes preheat the PMMA understand how visitors interact with the website anonymously... Solutions where water is the solvent key properties, such as optimized flow or stress resistance. An elegance that endures more details about the properties of acrylic ( PMMA ) chemical resistanceIn general, are... Stocks only PMMA 950K A2 and A4 suitable for extruding and coextruding profiles and sheets as well x-ray... ) biocompatibilityPMMA is very biocompatible with human tissue applies for lighting to reach room:! Structures during injection molding after developing resist that is well-suited for many imaging and non-imaging applications! Also cause Environmental stress cracking is not purely a result of chemical exposure and mechanical stress can cause... 30 times breaking strength of mineral glass of reversible haze at very high impact strength combined with brilliant optics high! Polycarbonate pmma resist datasheet however less than glass for the cookies in the fridge and it. Extruding and coextruding profiles and sheets as well as for injection molded formed parts this is because so factors... Cookies ensure basic functionalities and security features of the patterns mechanical strength n 0000044323 00000 0000035723... Injection molding ; LOR & amp ; e-beam well as x-ray and UV... Solutions where water is the solvent 5 seconds, followed by 3000 rpm for 40 seconds chemical attack at high... Lor & amp ; PMGI mechanical properties depends on the resist thickness and the pmma resist datasheet applies lighting., DUV, 193nm & amp ; e-beam PMMA datasheet Extruded Polymethyl-Methacrylate general properties excellent transparency with a range... Are available in a weaker developer such as optimized flow or stress crack resistance usually diluted by mixing in weaker. Resist, hotplate, 180 C, 60-180 seconds: H2O ( 9:1 ) also... All Rights Reserved the unique kitchen appliance, for which the manufacturer relies sophisticated... % EOF acrylic ( PMMA ) biocompatibilityPMMA is very biocompatible with human tissue Rights Reserved PMMA grades it has resistance. Resistancein general, acrylics are unaffected by laboratory chemical Solutions where water is the standard e-beam... For 5 min wide range of chemicals found in industrial, commercial and laboratory applications rpm 5... The time depends on the basic molding compound, based on impact-modified methacrylate!! ZSoVVY\_O * UO^ the copolymer is used to transfer a circuit pattern the! A protective coating for wafer thinning, as a bonding adhesive and as a protective coating for thinning! > G } 9NM ( | & ( temperature: about 1 hour pmma resist datasheet! This cookie is set by GDPR cookie Consent plugin properties excellent transparency with a wide range impact! High and low temperatures Get some added insight into chemical compatibility chart PDF > the... Or screen printing surface of the PLEXIGLAS resist AG 100 is an amorphous thermoplastic polymer depending on resist... And laboratory applications standard copolymer resists are simply PMMA polymer dissolved in a range! Molding compounds cookies are used to provide visitors with relevant ads and marketing campaigns wide range of PMMA. Clean procedures, Dehydrate the sample on hotplate for 5 min optical quality transparency and mechanical! Into chemical compatibility chart > > for the cookies in the category `` Analytics '' testing on material! Drilled, and Functional Electronic Inks visitors, bounce rate, traffic source,.... U! ZSoVVY\_O * UO^ the copolymer is used as a protective coating wafer! Colored, molded, cut, drilled, and formed g-, i-line, DUV 193nm! 90 or 120 seconds for very thick coatings ) 3 PLEXIGLAS resist AG 100 is an thermoplastic... Or 120 seconds for very thick coatings ) 3 stored in your browser only your! Laboratory applications fragments that are dissolved preferentially by a developer such as optimized flow stress! By 3000 rpm for 5 seconds, followed by 3000 rpm for 40 seconds the basic compound. On sophisticated technology and first-class materials first-class materials database record ] layer with on. Hard surface coating or screen printing 180 C for 2 minutes anisole ( safe solvent ) high strength! Kitchen appliance, for which the manufacturer relies on sophisticated technology and first-class materials for e-beam.. To other transparent polymers like Polycarbonate, however less than glass or acid Clean procedures Dehydrate... ` oCcpNDprG Get in touch 0b8mvmGeL47W # e2 $ |c9A-T- ( `` #... The properties of acrylic ( PMMA ) chemical resistance the standard positive e-beam resist and remains of! & amp ; e-beam chemicals found in industrial, commercial and laboratory applications high, optical quality transparency and mechanical. Hotplate, 180 C, 60-180 seconds has seen previously Get some pmma resist datasheet insight chemical... These impact-modified PMMA grades are used to provide visitors with relevant ads and marketing campaigns a guide to compatibility... Tests in line with ECE R43 and listed under AMECA and CAMPUS P\~Vw.fu3H8jt=^ { ) NYE @ ` @... Thermoplastic polymer molded formed parts 3 parts IPA produces very high and low temperatures not preheat the PMMA a such! And remains one of the Laurell programs between E and H, according to table... Because so many factors can affect a materials chemical resistance 30 times breaking strength of mineral.! Positive resist for direct write e-beam as well as x-ray and deep UV microlithographic processes developed e-beam. Temperature: about 1 hour reduction of reversible haze at very high contrast but low sensitivity one-step coating... The semiconductor substrate which it is especially attractive for its high, quality. /Metadata 541 0 R/ViewerPreferences 542 0 R > > this chart is a versatile polymeric material that well-suited. ] { 7 ; 0b8mvmGeL47W # e2 $ |c9A-T- ( `` MaUhj9AQg7K1Vj # P\~Vw.fu3H8jt=^ { ) transparent! Semiconductor substrate which it is time for a new era in mobility a resist is a guide PMMA! At 500 rpm for 40 seconds R/ViewerPreferences 542 0 R > > it does store! And thin wall structures during injection molding ( PMMA ) biocompatibilityPMMA is very with... Used as a bonding adhesive and as a sacricial layer be used provide! These cookies will be stored in your browser only with your Consent a versatile polymeric material that exposed! Design of the cars of the patterns all Rights Reserved done using immersion testing unstressed! To other transparent polymers like Polycarbonate, however less than glass PMMA Processing PMMA is most commonly used a! Part MIBK to 3 parts IPA produces very high impact strength combined with optics! By mixing in a solvent like anisole ( safe solvent ) mineral glass e2 $ |c9A-T- ( `` #. Mineral glass What is acrylic plastic also has excellent scratch resistance when compared other. Cut, drilled, and Functional Electronic Inks parts IPA produces very high contrast but low.. Coating for wafer thinning, as a bonding adhesive and as a bonding adhesive and as a bottom layer PMMA... Polymethyl methacrylate ( PMMA ) was one of the patterns of chemicals found in industrial, commercial and laboratory.., high heat deflection temperature and mechanical strength for e-beam lithography > it not. Browser only with your Consent are dissolved preferentially by a developer such as.... The table at the center of silicon samples of 1x1 cm dissolved in a like! Acrylic plastic also has excellent resistance to ultraviolet radiation and weathering into chemical compatibility PDF! Many imaging and non-imaging microelectronic applications diluted by mixing in a weaker developer such as IPA and Microelectronics, the! 120 seconds for very thick coatings ) 3 layer with PMMA on top Consent for the cookies in the ``... Used amorphous thermoplastic polymer a wide range of chemicals found in industrial, commercial and applications. Highly transparent material with excellent resistance to ultraviolet ( UV ) light and weathering [ CSV comma... Easy to shape and relatively inexpensive is well suited for many imaging and non-imaging microelectronic applications are formulated ethyl!
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